Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10988649 | Method for imparting water repellency to substrate, surface treatment agent, and method for suppressing collapse of organic pattern or inorganic pattern in cleaning substrate surface with cleaning liquid | Kenji Seki | 2021-04-27 |
| 10961422 | Surface treatment liquid, surface treatment method, and method for suppressing pattern collapse | Shinji Kumada, Kenji Seki | 2021-03-30 |