Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11149694 | Canister | — | 2021-10-19 |
| 10988649 | Method for imparting water repellency to substrate, surface treatment agent, and method for suppressing collapse of organic pattern or inorganic pattern in cleaning substrate surface with cleaning liquid | Takumi Namiki | 2021-04-27 |
| 10961422 | Surface treatment liquid, surface treatment method, and method for suppressing pattern collapse | Shinji Kumada, Takumi Namiki | 2021-03-30 |
| 10941301 | Surface treatment method, surface treatment agent, and method for forming film region-selectively on substrate | — | 2021-03-09 |
| 10920179 | Cleaning solution and method for cleaning substrate | Tatsuo Goto | 2021-02-16 |