Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164730 | Plasma probe device and plasma processing apparatus | Taro Ikeda, Tomohito Komatsu, Hiroyuki Miyashita, Susumu Saito, Kazuhiro Furuki +2 more | 2021-11-02 |
| 11152269 | Plasma processing apparatus and control method | Taro Ikeda | 2021-10-19 |
| 10971413 | Plasma processing apparatus and control method | Taro Ikeda | 2021-04-06 |