Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164730 | Plasma probe device and plasma processing apparatus | Taro Ikeda, Tomohito Komatsu, Yuki Osada, Hiroyuki Miyashita, Susumu Saito +2 more | 2021-11-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11164730 | Plasma probe device and plasma processing apparatus | Taro Ikeda, Tomohito Komatsu, Yuki Osada, Hiroyuki Miyashita, Susumu Saito +2 more | 2021-11-02 |