Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11086286 | Substrate processing system, substrate processing method, and control program | Toshiharu Hirata, Takafumi Matsuhashi, Kunio Takano, Kouichi Nakajima | 2021-08-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11086286 | Substrate processing system, substrate processing method, and control program | Toshiharu Hirata, Takafumi Matsuhashi, Kunio Takano, Kouichi Nakajima | 2021-08-10 |