Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127615 | Substrate processing system and substrate transfer method | Kunio Takano, Toshiharu Hirata | 2021-09-21 |
| 11086286 | Substrate processing system, substrate processing method, and control program | Toshiharu Hirata, Yosuke Katada, Kunio Takano, Kouichi Nakajima | 2021-08-10 |