Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171014 | Substrate processing method and substrate processing apparatus | Hideomi HANE, Kentaro Oshimo, Shimon Otsuki, Jun Ogawa, Noriaki Fukiage +2 more | 2021-11-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171014 | Substrate processing method and substrate processing apparatus | Hideomi HANE, Kentaro Oshimo, Shimon Otsuki, Jun Ogawa, Noriaki Fukiage +2 more | 2021-11-09 |