Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11101114 | Plasma processing apparatus | Yuki Hosaka, Yoshihiro Umezawa | 2021-08-24 |
| 10950467 | Gas supply mechanism and semiconductor manufacturing system | Yuki Hosaka, Yoshihiro Umezawa, Mayo UDA, Kenichi Shimono | 2021-03-16 |