Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10950467 | Gas supply mechanism and semiconductor manufacturing system | Yuki Hosaka, Yoshihiro Umezawa, Toshiki Nakajima, Mayo UDA | 2021-03-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10950467 | Gas supply mechanism and semiconductor manufacturing system | Yuki Hosaka, Yoshihiro Umezawa, Toshiki Nakajima, Mayo UDA | 2021-03-16 |