Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158490 | Processing method in processing apparatus using halogen-based gas | Hiroshi Nagaike | 2021-10-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158490 | Processing method in processing apparatus using halogen-based gas | Hiroshi Nagaike | 2021-10-26 |