Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158490 | Processing method in processing apparatus using halogen-based gas | Tomohito MATSUO | 2021-10-26 |
| 10895014 | Processing method and processing apparatus of metal member | — | 2021-01-19 |