Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075106 | Transfer device | Hiroshi Koizumi | 2021-07-27 |
| 10971385 | Substrate processing apparatus and transfer position correcting method | Hiroki Oka, Hiroshi Narushima, Sho Otsuki | 2021-04-06 |