Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971385 | Substrate processing apparatus and transfer position correcting method | Hiroki Oka, Hiroshi Narushima, Takehiro Shindo | 2021-04-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10971385 | Substrate processing apparatus and transfer position correcting method | Hiroki Oka, Hiroshi Narushima, Takehiro Shindo | 2021-04-06 |