Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075076 | Method for manufacturing a semiconductor device and film deposition apparatus | Masato Koakutsu | 2021-07-27 |
| 10975466 | Method of cleaning exhaust pipe | Masato Koakutsu, Tsubasa WATANABE | 2021-04-13 |