Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075076 | Method for manufacturing a semiconductor device and film deposition apparatus | Takahito Umehara | 2021-07-27 |
| 10975466 | Method of cleaning exhaust pipe | Takahito Umehara, Tsubasa WATANABE | 2021-04-13 |
| 10961623 | Film forming method | — | 2021-03-30 |