OH

Osamu Hirakawa

TL Tokyo Electron Limited: 1 patents #275 of 787Top 35%
Overall (2021): #311,336 of 548,734Top 60%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10946419 Foreign substance removal apparatus and foreign substance detection apparatus Yoshitaka Otsuka 2021-03-16