Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10906756 | Substrate processing device | Shinji Wakabayashi | 2021-02-02 |
| 10896835 | Processing system | Atsushi Kawabe | 2021-01-19 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10906756 | Substrate processing device | Shinji Wakabayashi | 2021-02-02 |
| 10896835 | Processing system | Atsushi Kawabe | 2021-01-19 |