AK

Atsushi Kawabe

TL Tokyo Electron Limited: 2 patents #116 of 787Top 15%
Overall (2021): #178,975 of 548,734Top 35%
2
Patents 2021

Issued Patents 2021

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
11127614 Substrate transfer method and substrate transfer apparatus 2021-09-21
10896835 Processing system Keisuke Kondoh 2021-01-19