Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10968515 | Vertical heat treatment apparatus | Eiji Kikama, Kyungseok Ko, Shingo Hishiya, Keisuke Suzuki, Tosihiko Jo +2 more | 2021-04-06 |
| 10964530 | Method of forming blocking silicon oxide film, and storage medium | Kyungseok Ko, Eiji Kikama, Keisuke Suzuki, Shingo Hishiya | 2021-03-30 |