EK

Eiji Kikama

TL Tokyo Electron Limited: 2 patents #116 of 787Top 15%
Overall (2021): #164,791 of 548,734Top 35%
2
Patents 2021

Issued Patents 2021

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
10968515 Vertical heat treatment apparatus Hiromi Shima, Kyungseok Ko, Shingo Hishiya, Keisuke Suzuki, Tosihiko Jo +2 more 2021-04-06
10964530 Method of forming blocking silicon oxide film, and storage medium Kyungseok Ko, Hiromi Shima, Keisuke Suzuki, Shingo Hishiya 2021-03-30