Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11205577 | Method of selectively etching silicon oxide film on substrate | Akihiro Tsuji | 2021-12-21 |
| 11107692 | Etching method | Ryosuke Ebihara | 2021-08-31 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11205577 | Method of selectively etching silicon oxide film on substrate | Akihiro Tsuji | 2021-12-21 |
| 11107692 | Etching method | Ryosuke Ebihara | 2021-08-31 |