AT

Akihiro Tsuji

TL Tokyo Electron Limited: 1 patents #275 of 787Top 35%
📍 Rifu, JP: #123 of 314 inventorsTop 40%
Overall (2021): #541,522 of 548,734Top 100%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11205577 Method of selectively etching silicon oxide film on substrate Hikaru Watanabe 2021-12-21