Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11056371 | Tool and method for cleaning electrostatic chuck | Chi-Hung Liao | 2021-07-06 |
| 11018455 | Connector and transmission wafer thereof | Kai Wu, Che-Ting Wu, Chung-Nan Pao, Chih-Wei Chen | 2021-05-25 |
| 11003087 | Radiation source supply system for lithographic tools | Chi-Hung Liao | 2021-05-11 |
| D913950 | Terminal | Chih-Wei Chen, Chung-Nan Pao, Yu-Hsiung Lin, Kai Wu | 2021-03-23 |
| D913951 | Terminal | Chih-Wei Chen, Chung-Nan Pao, Yu-Hsiung Lin, Kai Wu | 2021-03-23 |