Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11022889 | Overlay-shift measurement system and method for manufacturing semiconductor structure and measuring alignment mark of semiconductor structure | Yu-Ching Lee | 2021-06-01 |
| 11018037 | Optical reticle load port | Yu-Ching Lee | 2021-05-25 |
| 10998213 | Reticle transportation container | Yu-Ching Lee | 2021-05-04 |
| 10962888 | Structures for acoustic wave overlay error determination using periodic structures | Yu-Ching Lee | 2021-03-30 |
| 10915017 | Multi-function overlay marks for reducing noise and extracting focus and critical dimension information | Yu-Ching Lee, Te-Chih Huang | 2021-02-09 |