Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10915017 | Multi-function overlay marks for reducing noise and extracting focus and critical dimension information | Yu-Ching Lee, Yu-Piao Fang | 2021-02-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10915017 | Multi-function overlay marks for reducing noise and extracting focus and critical dimension information | Yu-Ching Lee, Yu-Piao Fang | 2021-02-09 |