Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10964547 | Method of fabricating semiconductor structure | Chin-Han Meng, Chih-Hsien Hsu, Jr-Sheng Chen, An-Chi Li, Lin-Ching Huang | 2021-03-30 |
| 10957516 | Multi-zone gas distribution plate (GDP) and a method for designing the multi-zone GDP | Chin-Han Meng, Jr-Sheng Chen, Yin-Tun Chou, Chih-Hua Chan, Lin-Ching Huang | 2021-03-23 |