Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11047050 | Semiconductor tool having controllable ambient environment processing zones | Chiao-Chun Hsu, Chih-Ming Chen, Chung-Yi Yu | 2021-06-29 |
SL
Sheng-Hsun Lu
Overall (2021): #262,302 of 548,734Top 50%
1
Patents 2021