Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11209736 | Method for cleaning substrate, method for manufacturing photomask and method for cleaning photomask | Yu-Hsin Hsu, Hao-Ming Chang, Shao-Chi Wei, Cheng-Ming Lin | 2021-12-28 |
| 11048163 | Inspection method of a photomask and an inspection system | Tsun-Cheng Tang, Cheng-Ming Lin, Hao-Ming Chang, Waylen Chang | 2021-06-29 |