Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11209736 | Method for cleaning substrate, method for manufacturing photomask and method for cleaning photomask | Yu-Hsin Hsu, Hao-Ming Chang, Sheng-Chang Hsu, Cheng-Ming Lin | 2021-12-28 |