Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11092892 | Substrate measuring device and a method of using the same | Chi-Hung Liao | 2021-08-17 |
| 11081383 | Substrate table with vacuum channels grid | Chi-Hung Liao | 2021-08-03 |
| 11016390 | Method for exposing wafer | Chi-Hung Liao | 2021-05-25 |
| 10971352 | Cleaning method and apparatus | Chi-Hung Liao | 2021-04-06 |