Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075104 | Semiconductor chuck and method of making | Fu-Zen Lin, Chien-Hsiang Chen, Hsu-Shui Liu, Cheng-Yi Huang | 2021-07-27 |
| 10964559 | Wafer etching apparatus and method for controlling etch bath of wafer | Tai-I Yang, Tien-Lu Lin | 2021-03-30 |