Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183424 | Barrier layer formation for conductive feature | Ya-Lien Lee | 2021-11-23 |
| 11043413 | Barrier layer formation for conductive feature | Ya-Lien Lee | 2021-06-22 |
| 11043416 | Gradient atomic layer deposition | Ya-Lien Lee | 2021-06-22 |