Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11053584 | System and method for supplying a precursor for an atomic layer deposition (ALD) process | Chien-Kuo Huang, Tai-Chun Huang, Kuang-Yuan Hsu, Tze-Liang Lee | 2021-07-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11053584 | System and method for supplying a precursor for an atomic layer deposition (ALD) process | Chien-Kuo Huang, Tai-Chun Huang, Kuang-Yuan Hsu, Tze-Liang Lee | 2021-07-06 |