Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11200362 | 3D resist profile aware resolution enhancement techniques | Hua Song, Cheng-En Wu | 2021-12-14 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11200362 | 3D resist profile aware resolution enhancement techniques | Hua Song, Cheng-En Wu | 2021-12-14 |