Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11200362 | 3D resist profile aware resolution enhancement techniques | Hua Song, James P. Shiely | 2021-12-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11200362 | 3D resist profile aware resolution enhancement techniques | Hua Song, James P. Shiely | 2021-12-14 |