Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11066756 | Crystal growth apparatus, method for manufacturing silicon carbide single crystal, silicon carbide single crystal substrate, and silicon carbide epitaxial substrate | Shin Harada, Sho SASAKI, Tetsuya Kishida | 2021-07-20 |
| 11053607 | Silicon carbide epitaxial substrate and method for manufacturing silicon carbide semiconductor device | Keiji Wada, Taro Nishiguchi | 2021-07-06 |
| 10998406 | Silicon carbide single crystal substrate, silicon carbide epitaxial substrate, and method of manufacturing silicon carbide semiconductor device | — | 2021-05-04 |