Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11053607 | Silicon carbide epitaxial substrate and method for manufacturing silicon carbide semiconductor device | Keiji Wada, Tsutomu Hori | 2021-07-06 |
| 11004941 | Silicon carbide epitaxial substrate having grooves extending along main surface and method of manufacturing silicon carbide semiconductor device | Keiji Wada, Hironori Itoh | 2021-05-11 |