MS

Masamitsu Shinozuka

SC Sumitomo Heavy Industries Ion Technology Co.: 1 patents #1 of 10Top 10%
📍 Yachiyo, JP: #2 of 7 inventorsTop 30%
Overall (2021): #341,768 of 548,734Top 65%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10896843 Wafer holding device and wafer chucking and dechucking method Fumiaki Sato, Suguru Hirokawa 2021-01-19