SH

Suguru Hirokawa

SC Sumitomo Heavy Industries Ion Technology Co.: 1 patents #1 of 10Top 10%
📍 Higashi Hiroshima, JP: #5 of 7 inventorsTop 75%
Overall (2021): #247,192 of 548,734Top 50%
1
Patents 2021

Issued Patents 2021

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10896843 Wafer holding device and wafer chucking and dechucking method Fumiaki Sato, Masamitsu Shinozuka 2021-01-19