Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11187747 | Inspection system and malfunction analysis/prediction method for inspection system | — | 2021-11-30 |
| 11009544 | Inspection system, wafer map display, wafer map display method, and computer program | Shin-ichi Uchida | 2021-05-18 |