Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10923359 | Limited dose and angle directed beam assisted ALE and ALD processes for localized coatings on non-planar surfaces | Thomas E. Seidel | 2021-02-16 |
| 10923459 | Three dimensional integrated circuit | Theodore E. FONG | 2021-02-16 |
| 10896823 | Limited dose atomic layer processes for localizing coatings on non-planar surfaces | Thomas E. Seidel | 2021-01-19 |