Thomas E. Seidel — 3 Patents at Genus

Issued Patents 2021

Showing 1–3 of 3 patents

Patent #	Title	Co-Inventors	Date
10996562	Method and structure for nanoimprint lithography masks using optical film coatings	—	2021-05-04
10923359	Limited dose and angle directed beam assisted ALE and ALD processes for localized coatings on non-planar surfaces	Michael I. Current	2021-02-16
10896823	Limited dose atomic layer processes for localizing coatings on non-planar surfaces	Michael I. Current	2021-01-19