Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10996562 | Method and structure for nanoimprint lithography masks using optical film coatings | — | 2021-05-04 |
| 10923359 | Limited dose and angle directed beam assisted ALE and ALD processes for localized coatings on non-planar surfaces | Michael I. Current | 2021-02-16 |
| 10896823 | Limited dose atomic layer processes for localizing coatings on non-planar surfaces | Michael I. Current | 2021-01-19 |