Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11018015 | Composition for forming organic film, substrate for manufacturing semiconductor device, method for forming organic film, and patterning process | Tsutomu Ogihara, Daisuke KORI, Seiichiro Tachibana, Naoki Kobayashi, Kazumi Noda | 2021-05-25 |