Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11181821 | Composition for forming organic film, substrate for manufacturing semiconductor apparatus, method for forming organic film, patterning process, and polymer | Tsutomu Ogihara, Takeru Watanabe, Keisuke NIIDA, Takashi SAWAMURA | 2021-11-23 |
| 11042090 | Composition for forming organic film | Seiichiro Tachibana, Hiroko Nagai, Tsutomu Ogihara | 2021-06-22 |
| 11018015 | Composition for forming organic film, substrate for manufacturing semiconductor device, method for forming organic film, and patterning process | Tsutomu Ogihara, Seiichiro Tachibana, Yusuke Biyajima, Naoki Kobayashi, Kazumi Noda | 2021-05-25 |
| 10998197 | Polymer and composition for forming organic film, substrate for manufacturing semiconductor apparatus, method for forming organic film, and patterning process | Tsutomu Ogihara, Takeru Watanabe, Keisuke NIIDA, Takashi SAWAMURA | 2021-05-04 |