Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11163232 | Resist composition, patterning process, and barium salt | Jun Hatakeyama, Masaki Ohashi | 2021-11-02 |
| 11156916 | Resist composition and patterning process | Jun Hatakeyama | 2021-10-26 |