Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211233 | Film formation apparatus | — | 2021-12-28 |
| 11160994 | Particle beam therapy system and particle beam therapy method | Yuki Ito | 2021-11-02 |
| 11004665 | Plasma processing apparatus | Yoshio Kawamata | 2021-05-11 |
| 10903059 | Film formation apparatus | Yu Kambe | 2021-01-26 |
| 10896841 | Film formation apparatus | — | 2021-01-19 |