Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127574 | Plasma processing apparatus | Yoshio Kawamata | 2021-09-21 |
| 10903059 | Film formation apparatus | Daisuke Ono | 2021-01-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11127574 | Plasma processing apparatus | Yoshio Kawamata | 2021-09-21 |
| 10903059 | Film formation apparatus | Daisuke Ono | 2021-01-26 |