Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139166 | Method for manufacturing sputtering target, method for forming oxide film, and transistor | Shunpei Yamazaki, Masashi TSUBUKU, Masashi Oota, Noritaka Ishihara | 2021-10-05 |