Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139166 | Method for manufacturing sputtering target, method for forming oxide film, and transistor | Shunpei Yamazaki, Masashi TSUBUKU, Yoichi KUROSAWA, Noritaka Ishihara | 2021-10-05 |
| 10892282 | Metal oxide film and method for forming metal oxide film | Masahiro Takahashi, Takuya Hirohashi, Masashi TSUBUKU, Noritaka Ishihara | 2021-01-12 |
| 10886373 | Composite oxide semiconductor and method for manufacturing the same | Shunpei Yamazaki, Yasutaka NAKAZAWA | 2021-01-05 |