Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11167326 | Substrate processing apparatus and nozzle unit | Doyeon KIM, Jinkyu Kim, Yoon Jong Ju | 2021-11-09 |
| 10964557 | Substrate processing apparatus and substrate processing method | Do Yeon Kim, Jin Kyu Kim, Yoon Jong Ju, Joon Ho WON, Yong Tak Hyun | 2021-03-30 |